{"version":"1.0","type":"link","title":"Atomic layer etching - Newikis","description":"Atomic layer etching (ALE) is an emerging technique in semiconductor manufacture, in which a sequence alternating between self-limiting chemical modification steps which affect only the top atomic layers of the wafer, and etching steps which remove only the chemically-modified areas, allows the…","provider_name":"Newikis","provider_url":"https://newikis.com","cache_age":86400}