Hopwood, J.; Guarnieri, C.R.; Whitehair, S.J.; Cuomo, J.J. (1993). "Electromagnetic fields in a radio‐frequency induction plasma". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 11 (1): 147. Bibcode:1993JVST...11..147H. doi:10.1116/1.578281. IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598.